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College of Engineering(공과대학)Dept. of Industrial and Systems Engineering(산업및시스템공학과)IE-Conference Papers(학술회의논문)

Optimal scheduling of transient cycles for single-armed cluster tools

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dc.contributor.authorKim, Dae-Kyu-
dc.contributor.authorLee, Tae-Eog-
dc.contributor.authorKim, Hyun-Jung-
dc.date.accessioned2014-08-28T06:17:40Z-
dc.date.available2014-08-28T06:17:40Z-
dc.date.created2014-01-08-
dc.date.issued2013-08-17-
dc.identifier.citationIEEE International Conference on Automation Science and Engineering, v., no., pp.874 - 879-
dc.identifier.issn2161-8070-
dc.identifier.urihttp://hdl.handle.net/10203/188037-
dc.languageENG-
dc.publisherIEEE-
dc.titleOptimal scheduling of transient cycles for single-armed cluster tools-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage874-
dc.citation.endingpage879-
dc.citation.publicationnameIEEE International Conference on Automation Science and Engineering-
dc.identifier.conferencecountryUnited States-
dc.identifier.doi10.1109/CoASE.2013.6653939-
dc.contributor.localauthorLee, Tae-Eog-
dc.contributor.nonIdAuthorKim, Dae-Kyu-
dc.contributor.nonIdAuthorKim, Hyun-Jung-
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IE-Conference Papers(학술회의논문)

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