가스상 반응 스퍼터링 방법을 이용한 얇고 평활한 PbTiO3 나노 박막의 제조와 특성 분석Fabrication and characterization of thin and smooth PbTiO3 nano films deposited by gas phase reaction sputtering
- Advisors
- 노광수researcher; No, Kwang-Soo
- Description
- 한국과학기술원 : 신소재공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 2007
- Identifier
- 487917/325007 / 020053143
- Language
- kor
- Description
참고문헌 : p. 79-80 한국과학기술원 : 신소재공학과, 2007.2, [ ix, 81 p. ]
- Keywords
강유전체; 초박막; ferroelectric; ultra-thin film; gas phase reaction sputtering; 가스상 반응 스퍼터링
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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