가스상 반응 스퍼터링 방법을 이용한 얇고 평활한 PbTiO3 나노 박막의 제조와 특성 분석Fabrication and characterization of thin and smooth PbTiO3 nano films deposited by gas phase reaction sputtering

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dc.contributor.advisor노광수-
dc.contributor.advisorNo, Kwang-Soo-
dc.contributor.author김지윤-
dc.contributor.authorKim, Ji-Yoon-
dc.date.accessioned2013-09-12T04:46:22Z-
dc.date.available2013-09-12T04:46:22Z-
dc.date.issued2007-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=487917&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/182025-
dc.description참고문헌 : p. 79-80 한국과학기술원 : 신소재공학과, 2007.2, [ ix, 81 p. ]-
dc.languagekor -
dc.publisher한국과학기술원-
dc.subject강유전체-
dc.subject초박막-
dc.subjectferroelectric-
dc.subjectultra-thin film-
dc.subjectgas phase reaction sputtering-
dc.subject가스상 반응 스퍼터링-
dc.title가스상 반응 스퍼터링 방법을 이용한 얇고 평활한 PbTiO3 나노 박막의 제조와 특성 분석-
dc.title.alternativeFabrication and characterization of thin and smooth PbTiO3 nano films deposited by gas phase reaction sputtering-
dc.typeThesis(Master)-
dc.identifier.CNRN487917/325007 -
dc.description.department한국과학기술원 : 신소재공학과, -
dc.identifier.uid020053143-
dc.contributor.localauthor노광수-
dc.contributor.localauthorNo, Kwang-Soo-
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