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DLI-MOCVD법을 이용한 Pb계 강유전체 박막의 저온 증착 = Low temperature metalorganic chemical vapor deposition of Pb-based ferroelectric thin films using direct liquid injection systemslink 변경문; Byun, Kyung-Mun; et al, 한국과학기술원, 2004 |
PREPARATION OF (PB0.88LA0.12)TIO3 THIN-FILMS FOR DYNAMIC RANDOM-ACCESS MEMORY BY LOW PRESSURE-METALORGANIC CHEMICAL-VAPOR-DEPOSITION Kim, Ho-Gi; Lee, Seaung-Suk, JOURNAL OF ELECTRONIC MATERIALS, v.24, no.8, pp.1023 - 1027, 1995 |
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