DLI-MOCVD법을 이용한 Pb계 강유전체 박막의 저온 증착 = Low temperature metalorganic chemical vapor deposition of Pb-based ferroelectric thin films using direct liquid injection systems

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Advisors
이원종researcherLee, Won-Jongresearcher
Description
한국과학기술원 : 신소재공학과,
Publisher
한국과학기술원
Issue Date
2004
Identifier
237594/325007  / 000995182
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 신소재공학과, 2004, [ iv, 193 p. ]

Keywords

전극; 저온; 박막; 강유전체; 환원; REDUCTION; ELECTRODE; DEPOSITION; FILM; FERROELECTRIC

URI
http://hdl.handle.net/10203/49789
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=237594&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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