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Measurement of thermal expansion coefficient of poly-Si using microgauge sensors Chae, Jung-Hun; Lee, Jae-Youl; Kang, Sang-Won, SPIE Vol. 3242, pp.202-211, 1997 |
Measurement of thermal expansion coefficient of poly-Si using microgauge sensors Chae, JH; Lee, JY; Kang, Sang-Won, SENSORS AND ACTUATORS A-PHYSICAL, v.75, no.3, pp.222 - 229, 1999-06 |
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