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Evaluation of tin nitride (Sn3N4) via atomic layer deposition using novel volatile Sn precursors Park, Hyeonbin; Choi, Heenang; Shin, Sunyoung; Park, Bo Keun; Kang, Kibum; Ryu, Ji Yeon; Eom, Taeyong; et al, DALTON TRANSACTIONS, v.52, no.41, pp.15033 - 15042, 2023-10 |
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