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Hermetic packaging of micro scanner for laser display applications

Choi, WK; Cho, MG; Seo, SK; Lee, Hyuck Mo; Jeong, BG; Lee, HS; Ko, YC; et al, ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005, pp.751 - 756, 2005-07-17

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