Hermetic packaging of micro scanner for laser display applications

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Issue Date
2005-07-17
Language
ENG
Citation

ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005, pp.751 - 756

URI
http://hdl.handle.net/10203/140935
Appears in Collection
MS-Conference Papers(학술회의논문)
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