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Microstructure and electric properties of the PZT thin films fabricated by ECR PECVD: the effects of an interfacial layer and rapid thermal annealing Chung, Su Ock; Kim, Jae Whan; Kim, Sung Tae; Kim, Geun Hong; Lee, Won-Jong, MATERIALS CHEMISTRY AND PHYSICS, v.53, no.1, pp.60 - 66, 1998 |
Microstructure and electric properties of the PZT thin films fabricated by ECR PECVD: The effects of an interfacial layer and rapid thermal annealing Chung, Su Ock; Kim, Jae Whan; Kim, Sung Tae; Kim, Geun Hong; Lee, Won Jong, Materials Chemistry and Physics, Vol.53, pp.60-66, 1997-04 |
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