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Control and modeling of stress in multi-stacked polysilicon films considering oxidation effect Lee, CS; Jang, WI; Choi, CA; Hong, YS; Lee, JH; No, Kwangsoo; Wee, DM, Micromachining and Microfabrication Process Technology IV, v.3511, pp.315 - 324, 1998-09-21 |
Effects of phosphorus on stress of multi-stacked polysilicon film and single crystalline silicon Lee, CS; Lee, JH; Choi, CA; No, Kwangsoo; Wee, Dang-Moon, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, v.9, no.3, pp.252 - 263, 1999-09 |
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