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Bonding of silicon scanning mirror having vertical comb fingers Lee, JH; Ko, YC; Choi, BS; Kim, JM; Jeon, DukYoung, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, v.12, no.5, pp.644 - 649, 2002-09 |
Characterization of silicon scanning mirror for laser display Lee, JH; Ko, YC; Choi, BS; Kim, JM; Jeon, DukYoung, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.41, no.9, pp.5853 - 5857, 2002-09 |
Laser graphic video display using silicon scanning mirrors with vertical comb fingers Lee, JH; Ko, YC; Mun, YK; Choi, BS; Kim, JM; Jeon, DukYoung, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.41, no.9, pp.5868 - 5869, 2002-09 |
SO1-based fabrication processes of the scanning mirror having vertical comb fingers Lee, JH; Ko, YC; Jeong, HM; Choi, BS; Kim, JM; Jeon, DukYoung, SENSORS AND ACTUATORS A-PHYSICAL, v.102, no.1-2, pp.11 - 18, 2002-12 |
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