Showing results 1 to 2 of 2
Crystalline structure and Cu diffusion barrier property of Ta-Si-N films | [Ta-Si-N Korean source] Jung, Byoung-Hyo; Lee, Won-Jong, KOREAN JOURNAL OF MATERIALS RESEARCH, v.21, no.2, pp.95 - 99, 2011-02 |
구리확산방지막용 질화텅스텐 박막의 열적 안정성과 미세구조 = Thermal stabilities and microstructures of $WN_x$ films as a Cu diffusion barrierlink 서봉석; Suh, Bong-Seok; et al, 한국과학기술원, 2000 |
Discover