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Plasma-enhanced ALD of titanium-silicon-nitride using TiCl4, SiH4, and N-2/H-2/Ar plasma Park, JS; Kang, SW, ELECTROCHEMICAL AND SOLID STATE LETTERS, v.7, no.8, pp.C87 - C89, 2004 |
Three-Dimensional Nanofabrication by Block Copolymer Self-Assembly Ross, Caroline A.; Berggren, Karl K.; Cheng, Joy Y.; Jung, Yeon Sik; Chang, Jae-Byum, ADVANCED MATERIALS, v.26, no.25, pp.4386 - 4396, 2014-07 |
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