Chromatic confocal microscopy with a novel wavelength detection method using transmittance

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Chromatic confocal microscopy (CCM) is a promising technology that enables high-speed three-dimensional surface profiling without mechanical depth scanning. However, the spectrometer, which measures depth information encoded by axial color, limits the speed of three-dimensional imaging. We present a novel method for chromatic confocal microscopy with transmittance detection. Depth information can be instantaneously obtained by the ratio of intensity signals from two photomultiplier tubes by detecting a peak wavelength using transmittance of a color filter. This non-destructive and high-speed surface profiling method might be useful in many fields, including the semiconductor and flat panel display industries, and in material science. (c) 2013 Optical Society of America
Publisher
OPTICAL SOC AMER
Issue Date
2013-03
Language
English
Article Type
Article
Citation

OPTICS EXPRESS, v.21, no.5, pp.6286 - 6294

ISSN
1094-4087
DOI
10.1364/OE.21.006286
URI
http://hdl.handle.net/10203/174835
Appears in Collection
ME-Journal Papers(저널논문)
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