DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Taejoong | ko |
dc.contributor.author | Kim, Sang Hoon | ko |
dc.contributor.author | Do, DukHo | ko |
dc.contributor.author | Yoo, Hongki | ko |
dc.contributor.author | Gweon, Dae-Gab | ko |
dc.date.accessioned | 2013-08-08T06:03:48Z | - |
dc.date.available | 2013-08-08T06:03:48Z | - |
dc.date.created | 2013-04-26 | - |
dc.date.created | 2013-04-26 | - |
dc.date.created | 2013-04-26 | - |
dc.date.created | 2013-04-26 | - |
dc.date.created | 2013-04-26 | - |
dc.date.issued | 2013-03 | - |
dc.identifier.citation | OPTICS EXPRESS, v.21, no.5, pp.6286 - 6294 | - |
dc.identifier.issn | 1094-4087 | - |
dc.identifier.uri | http://hdl.handle.net/10203/174835 | - |
dc.description.abstract | Chromatic confocal microscopy (CCM) is a promising technology that enables high-speed three-dimensional surface profiling without mechanical depth scanning. However, the spectrometer, which measures depth information encoded by axial color, limits the speed of three-dimensional imaging. We present a novel method for chromatic confocal microscopy with transmittance detection. Depth information can be instantaneously obtained by the ratio of intensity signals from two photomultiplier tubes by detecting a peak wavelength using transmittance of a color filter. This non-destructive and high-speed surface profiling method might be useful in many fields, including the semiconductor and flat panel display industries, and in material science. (c) 2013 Optical Society of America | - |
dc.language | English | - |
dc.publisher | OPTICAL SOC AMER | - |
dc.title | Chromatic confocal microscopy with a novel wavelength detection method using transmittance | - |
dc.type | Article | - |
dc.identifier.wosid | 000316103300118 | - |
dc.identifier.scopusid | 2-s2.0-84875181287 | - |
dc.type.rims | ART | - |
dc.citation.volume | 21 | - |
dc.citation.issue | 5 | - |
dc.citation.beginningpage | 6286 | - |
dc.citation.endingpage | 6294 | - |
dc.citation.publicationname | OPTICS EXPRESS | - |
dc.identifier.doi | 10.1364/OE.21.006286 | - |
dc.contributor.localauthor | Yoo, Hongki | - |
dc.contributor.localauthor | Gweon, Dae-Gab | - |
dc.contributor.nonIdAuthor | Kim, Taejoong | - |
dc.contributor.nonIdAuthor | Kim, Sang Hoon | - |
dc.contributor.nonIdAuthor | Do, DukHo | - |
dc.description.isOpenAccess | Y | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | LIGHT | - |
dc.subject.keywordPlus | SUPERCONTINUUM | - |
dc.subject.keywordPlus | RESOLUTION | - |
dc.subject.keywordPlus | PROFILER | - |
dc.subject.keywordPlus | LENSES | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.