DSpace at KOASAS: Measurement of sub-micrometer features based on the topographic contrast using reflection confocal microscopy

DSpace at KOASAS

College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Measurement of sub-micrometer features based on the topographic contrast using reflection confocal microscopy

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Gweon, Dae-Gab researcher / Lee, SW / Kang, DK / Yoo, HK / Kim, TJ / Lee, SW / Kim, KS

Publisher: Optical Society of Korea

Issue Date: 2004-11-03

Language: ENG

Citation: 2nd International Symposium on Nano-manufacturing

URI: http://hdl.handle.net/10203/17410

Appears in Collection: ME-Conference Papers(학술회의논문)

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Measurement of sub-micrometer features based on the topographic contrast using reflection confocal microscopy

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