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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Measurement of sub-micrometer features based on the topographic contrast using reflection confocal microscopy

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dc.contributor.authorGweon, Dae-Gab-
dc.contributor.authorLee, SW-
dc.contributor.authorKang, DK-
dc.contributor.authorYoo, HK-
dc.contributor.authorKim, TJ-
dc.contributor.authorLee, SW-
dc.contributor.authorKim, KS-
dc.date.accessioned2010-03-29T06:58:36Z-
dc.date.available2010-03-29T06:58:36Z-
dc.date.created2012-02-06-
dc.date.issued2004-11-03-
dc.identifier.citation2nd International Symposium on Nano-manufacturing, v., no., pp. --
dc.identifier.urihttp://hdl.handle.net/10203/17410-
dc.languageENG-
dc.language.isoen_USen
dc.publisherOptical Society of Korea-
dc.titleMeasurement of sub-micrometer features based on the topographic contrast using reflection confocal microscopy-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationname2nd International Symposium on Nano-manufacturing-
dc.identifier.conferencecountrySouth Korea-
dc.identifier.conferencecountrySouth Korea-
dc.contributor.localauthorGweon, Dae-Gab-
dc.contributor.nonIdAuthorLee, SW-
dc.contributor.nonIdAuthorKang, DK-
dc.contributor.nonIdAuthorYoo, HK-
dc.contributor.nonIdAuthorKim, TJ-
dc.contributor.nonIdAuthorLee, SW-
dc.contributor.nonIdAuthorKim, KS-
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ME-Conference Papers(학술회의논문)

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