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The Effect of Postannealing on the Electrical Properties of (Pb,Sr)TiO3 Thin Films Prepared by Liquid Source Misted Chemical Deposition for Ultra Large-Scale Integration (ULSI) Dynamic Random Access Memory (DRAM) Capacitor Chung, Hyun-Jin; Chung, Suk-Jin; Kim, Jin-Hong; Woo, Seong-Ihl, THIN SOLID FILMS, v.394, no.1-2, pp.212 - 217, 2001-08 |
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