Showing results 8 to 16 of 16
Novel (Pb,Sr)TiO3(PST) thin films for ULSI DRAM capacitor prepared by liquid source misted chemical deposition (LSMCD) Chung, HJ; Woo, Seong-Ihl, Annual Meeting of the Korean Institute of Metals and Material, pp.53 -, the Korean Institute of Metals and Material, 1999 |
(Pb,Sr)TiO3 thin films for a ULSI DRAM capacitor prepared by liquid source misted chemical deposition Chung, HJ; Kim, JH; Woo, Seong-Ihl, CHEMISTRY OF MATERIALS, v.13, no.5, pp.1441 - 1441, 2001-05 |
(Pb,Sr)TiO3(PST) thin films for ULSI DRAM capacitor prepared by liquid source misted chemical deposition(LSMCD) Chung, HJ; Chung, SJ; Woo, Seong-Ihl, 한국화학공학회 학술발표회 , v.5, no.2, pp.4513 -, 한국화학공학회, 2000 |
Preparation and Characterization (Pb, Sr)TiO3 Thin films for Capacitor of ULSI DRAM by Liquid Source Misted Chemical Deposition Chung, HJ; Woo, Seong-Ihl, The 12th Symposium on Chemical Engineering Taejeon/Chungnam-Kyushu, pp.133 - 134, 1999 |
Preparation and electrical properties of (Ba,Sr)TiO3 thin films deposited by liquid source misted chemical deposition Chung, HJ; Choi, JH; Lee, JeongYong; Woo, Seong-Ihl, THIN SOLID FILMS, v.382, no.1-2, pp.106 - 112, 2001-02 |
Preparation and Electrical Properties of (Ba,Sr)TiO3 Thin Films Deposited by Liquid Source Misted Chemical Vapor Deposition (LSMCD) Lee, Jeong Yong; Woo, Seong-Ihl; Chung, HJ; Choi, JH, Asia Pacific Conference on Chemical Engineering 99 (APCChE99), pp.1901 - 1904, 1999-08-01 |
Preparation and Electrical Properties of Ferroelectric Thin Films deposited by Liguid Source Misted Chemical Deposition (LSMCVD) Chung, HJ; Woo, Seong-Ihl, The 2nd CVD Symposium, pp.31 - 37, 1999 |
Preparation of BST thin films on Pt electrode on Si wafer with down-flow LSMCVD reactor Chung, HJ; Kim, JH; Moon, WS; Park, SeungBin; Hwang, CS; Lee, MY; Woo, Seong-Ihl, 3rd Pacific Rim conference on the Applications of Ferroelectric Materials, pp.59 - 62, 1996 |
Preparation of BST thin films on Pt electrode on Si wafer with down-flow LSMCVD reactor Chung, HJ; Kim, JH; Moon, WS; Park, SeungBin; Hwang, SC; Lee, MY; Woo, Seong-Ihl, INTEGRATED FERROELECTRICS, v.12, no.2-4, pp.185 - 197, 1996 |
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