Preparation and Electrical Properties of Ferroelectric Thin Films deposited by Liguid Source Misted Chemical Deposition (LSMCVD)

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Issue Date
1999
Language
ENG
Citation

The 2nd CVD Symposium, pp.31 - 37

URI
http://hdl.handle.net/10203/129845
Appears in Collection
CBE-Conference Papers(학술회의논문)
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