Confocal Scanning Microscopy : a High-Resolution Nondestructive Surface Profiler

Abstract

Confocal scanning microscopy is a measurement technique used to observe micrometer and sub due to its high resolution, nondestructive properties, and 3D surface profiling capabilities. The design, implementation, and performance test of a confocal scanning microscopy system are presented in this paper A short-wavelength laser (405 nm) and an objective lens with a high numerical aperture (0.95) were used to achieve the desired high resolution, while the x- and y-axis scans were implemented using an acousto-optic deflector and galvanomirror respectively. An objective lens with a piezo-actuator was used to scan the z-axis. A spatial resolution of less than 138 nin was achieved, along with successful 3D surface reconstructions.