DC Field | Value | Language |
---|---|---|
dc.contributor.author | Yoo, Hongki | ko |
dc.contributor.author | Lee, Seungwoo | ko |
dc.contributor.author | Kang, Dongkyun | ko |
dc.contributor.author | Kim, Taejoong | ko |
dc.contributor.author | Gweon, Dae-Gab | ko |
dc.contributor.author | Lee, Sukwon | ko |
dc.contributor.author | Kim, Kwangsoo | ko |
dc.date.accessioned | 2010-02-18T07:44:17Z | - |
dc.date.available | 2010-02-18T07:44:17Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2006-10 | - |
dc.identifier.citation | INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, v.7, no.4, pp.3 - 7 | - |
dc.identifier.issn | 1229-8557 | - |
dc.identifier.uri | http://hdl.handle.net/10203/16690 | - |
dc.description.abstract | Confocal scanning microscopy is a measurement technique used to observe micrometer and sub due to its high resolution, nondestructive properties, and 3D surface profiling capabilities. The design, implementation, and performance test of a confocal scanning microscopy system are presented in this paper A short-wavelength laser (405 nm) and an objective lens with a high numerical aperture (0.95) were used to achieve the desired high resolution, while the x- and y-axis scans were implemented using an acousto-optic deflector and galvanomirror respectively. An objective lens with a piezo-actuator was used to scan the z-axis. A spatial resolution of less than 138 nin was achieved, along with successful 3D surface reconstructions. | - |
dc.language | English | - |
dc.language.iso | en_US | en |
dc.publisher | 한국정밀공학회 | - |
dc.title | Confocal Scanning Microscopy : a High-Resolution Nondestructive Surface Profiler | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.citation.volume | 7 | - |
dc.citation.issue | 4 | - |
dc.citation.beginningpage | 3 | - |
dc.citation.endingpage | 7 | - |
dc.citation.publicationname | INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING | - |
dc.embargo.liftdate | 9999-12-31 | - |
dc.embargo.terms | 9999-12-31 | - |
dc.identifier.kciid | ART001024257 | - |
dc.contributor.localauthor | Yoo, Hongki | - |
dc.contributor.localauthor | Gweon, Dae-Gab | - |
dc.contributor.nonIdAuthor | Lee, Seungwoo | - |
dc.contributor.nonIdAuthor | Kang, Dongkyun | - |
dc.contributor.nonIdAuthor | Kim, Taejoong | - |
dc.contributor.nonIdAuthor | Lee, Sukwon | - |
dc.contributor.nonIdAuthor | Kim, Kwangsoo | - |
dc.description.isOpenAccess | N | - |
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