Nano-structural Characteristics of N-doped ZnO Thin films and Fabrication of Film Bulk Acoustic Resonator Devices
- Publisher
- American Institute of Physics: International Conference on the Physics of Semiconductors(ICPS) 2010
- Issue Date
- 2010-07
- Language
- English
- Citation
International Conference on the Physics of Semiconductors(ICPS) 2010, pp.257 - 258
- ISSN
- 0094-243x
- Appears in Collection
- EE-Conference Papers(학술회의논문)
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