Three-dimensional surface profile measurement using a beam scanning chromatic confocal microscope

Abstract

In this research, chromatic confocal microscopy with transverse point beam scanning is constructed for three-dimensional surface measurement without longitudinal mechanical translation. In beam scanning chromatic confocal microscopy, the wavelength-to-depth relation and the lateral field of view should be determined considering the beam scanning angle. With the experimental results from a sample structure, the three-dimensional profile is reconstructed by relating the wavelength and scanning angle to the axial and the lateral coordinates.