Three-dimensional surface profile measurement using a beam scanning chromatic confocal microscope
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Chun, Byung Seon | ko |
| dc.contributor.author | Kim, Kwangsoo | ko |
| dc.contributor.author | Gweon, Dae-Gab | ko |
| dc.date.accessioned | 2010-02-08T07:40:34Z | - |
| dc.date.available | 2010-02-08T07:40:34Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2009-07 | - |
| dc.identifier.citation | REVIEW OF SCIENTIFIC INSTRUMENTS, v.80, no.7 | - |
| dc.identifier.issn | 0034-6748 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/16506 | - |
| dc.description.abstract | In this research, chromatic confocal microscopy with transverse point beam scanning is constructed for three-dimensional surface measurement without longitudinal mechanical translation. In beam scanning chromatic confocal microscopy, the wavelength-to-depth relation and the lateral field of view should be determined considering the beam scanning angle. With the experimental results from a sample structure, the three-dimensional profile is reconstructed by relating the wavelength and scanning angle to the axial and the lateral coordinates. | - |
| dc.language | English | - |
| dc.language.iso | en_US | en |
| dc.publisher | AMER INST PHYSICS | - |
| dc.subject | SUPERCONTINUUM | - |
| dc.subject | LIGHT | - |
| dc.subject | SIZE | - |
| dc.title | Three-dimensional surface profile measurement using a beam scanning chromatic confocal microscope | - |
| dc.type | Article | - |
| dc.identifier.wosid | 000268615700020 | - |
| dc.identifier.scopusid | 2-s2.0-68949119672 | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 80 | - |
| dc.citation.issue | 7 | - |
| dc.citation.publicationname | REVIEW OF SCIENTIFIC INSTRUMENTS | - |
| dc.identifier.doi | 10.1063/1.3184023 | - |
| dc.contributor.localauthor | Gweon, Dae-Gab | - |
| dc.type.journalArticle | Article | - |
| dc.subject.keywordAuthor | optical microscopes | - |
| dc.subject.keywordAuthor | optical scanners | - |
| dc.subject.keywordPlus | SUPERCONTINUUM | - |
| dc.subject.keywordPlus | LIGHT | - |
| dc.subject.keywordPlus | SIZE | - |
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