저결맞음 간섭계를 이용한 메조영역의 미세형상측정Meso-scale surface measurement using the low-coherence interferometry
- Publisher
- 한국정밀공학회
- Issue Date
- 2007-11
- Language
- KOR
- Citation
한국정밀공학회 2007년도 추계학술대회, v.7, pp.45 - 46
- Appears in Collection
- ME-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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