저결맞음 간섭계를 이용한 메조영역의 미세형상측정Meso-scale surface measurement using the low-coherence interferometry
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 유준호 | - |
| dc.contributor.author | 김승우 | - |
| dc.date.accessioned | 2013-03-27T09:08:31Z | - |
| dc.date.available | 2013-03-27T09:08:31Z | - |
| dc.date.created | 2012-03-21 | - |
| dc.date.issued | 2007-11 | - |
| dc.identifier.citation | 한국정밀공학회 2007년도 추계학술대회, v.7, no., pp.45 - 46 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/161122 | - |
| dc.language | KOR | - |
| dc.publisher | 한국정밀공학회 | - |
| dc.title | 저결맞음 간섭계를 이용한 메조영역의 미세형상측정 | - |
| dc.title.alternative | Meso-scale surface measurement using the low-coherence interferometry | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.volume | 7 | - |
| dc.citation.beginningpage | 45 | - |
| dc.citation.endingpage | 46 | - |
| dc.citation.publicationname | 한국정밀공학회 2007년도 추계학술대회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 김승우 | - |
| dc.contributor.nonIdAuthor | 유준호 | - |
- Appears in Collection
- ME-Conference Papers(학술회의논문)
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