Sublithographic Nanogap Fabrication Method Using Self-Assembled Monolayer Lithography

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Issue Date
2007-02
Language
KOR
Citation

The 14th Korean Conference on Semiconductors (KCS), pp.707 - 708

URI
http://hdl.handle.net/10203/159644
Appears in Collection
EE-Conference Papers(학술회의논문)
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