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Showing results 1 to 4 of 4

1
Schedulability Analysis for Noncyclic Operation of Time-Constrained Cluster Tools With Time Variation

Kim, Hyunjung; Lee, Jun-Ho; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.13, no.3, pp.1409 - 1414, 2016-07

2
Schedulability analysis of time-constrained cluster tools with bounded time variation by an extended Petri net

Kim, JH; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.5, no.3, pp.490 - 503, 2008-07

3
Scheduling analysis of time-constrained dual-armed cluster tools

Kim, JH; Lee, Tae-Eog; Lee, HY; Park, DB, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.16, no.3, pp.521 - 534, 2003-08

4
Wafer delay analysis and control of dual-armed cluster tools with chamber cleaning operations

Yu, Tae-Sun; Lee, Tae-Eog, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.58, no.2, pp.434 - 447, 2020-01

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