Browse "Dept. of Industrial and Systems Engineering(산업및시스템공학과)" by Subject MULTICLUSTER TOOLS

Showing results 1 to 11 of 11

1
An Efficient Mixed Integer Programming Model Based on Timed Petri Nets for Diverse Complex Cluster Tool Scheduling Problems

Jung, Chihyun; Lee, Tae-Eog, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.25, no.2, pp.186 - 199, 2012-05

2
Modeling, Analysis, and Scheduling of Cluster Tools With Two Independent Arms

Tonke, Daniel; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.13, no.2, pp.1176 - 1188, 2016-04

3
Multiclass Flow Line Models of Semiconductor Manufacturing Equipment for Fab-Level Simulation

Morrison, James R, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.8, no.1, pp.81 - 94, 2011-01

4
Optimal scheduling for sequentially connected cluster tools with dual-armed robots and a single input and output module

Kim, Dae-Kyu; Kim, Hyunjung; Lee, Tae-Eog, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.55, no.11, pp.3092 - 3109, 2017-07

5
Scheduling Cluster Tools for Concurrent Processing of Two Wafer Types

Lee, Jun-Ho; Kim, Hyunjung; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.11, no.2, pp.525 - 536, 2014-04

6
Scheduling cluster tools for concurrent processing of two wafer types with PM sharing

Lee, Jun-Ho; Kim, Hyunjung; Lee, Tae-Eog, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.53, no.19, pp.6007 - 6022, 2015-10

7
Scheduling Cluster Tools With Ready Time Constraints for Consecutive Small Lots

Kim, Hyun-Jung; Lee, Jun-Ho; Jung, Chi-Hyun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.10, no.1, pp.145 - 159, 2013-01

8
Scheduling Dual-Armed Cluster Tools for Concurrent Processing of Multiple Wafer Types With Identical Job Flows

Ko, Sung-Gil; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.16, no.3, pp.1058 - 1070, 2019-07

9
Scheduling In-Line Multiple Cluster Tools

Kim, Hyunjung; Lee, Jun-Ho; Baik, Sunhee; Lee, Tae-Eog, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.28, no.2, pp.171 - 179, 2015-05

10
Scheduling Lot Switching Operations for Cluster Tools

Lee, Jun-Ho; Kim, Hyunjung; Lee, Tae-Eog, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.26, no.4, pp.592 - 601, 2013-11

11
Scheduling Single-Armed Cluster Tools With Chamber Cleaning Operations

Yu, Tae Sun; Kim, Hyunjung; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.15, no.2, pp.705 - 716, 2018-04

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