Scheduling cluster tools for concurrent processing of two wafer types with PM sharing

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We examine cyclic scheduling of single-armed and dual-armed cluster tools that concurrently process two wafer types by sharing a process module (PM). Because a PM is shared by two different wafers, the backward and swap sequences, which are prevalently used for single-armed and dual-armed tools without such complexity, respectively, are not effective. We therefore propose new sequences, called alternating backward and alternating swap sequences, for steady cycles of single-armed and dual-armed tools, respectively. We then develop optimality conditions for which the proposed sequences achieve the minimum cycle times in a fundamental cycle, and show that the optimality conditions hold for most practical cases. We also develop a condition for which a shared PM becomes the bottleneck and hence the PM sharing increases the cycle time. For general cycles, we propose heuristic scheduling methods that combine both the alternating backward (or swap) sequence and the conventional backward (or swap) sequence. Finally, we experimentally verify the efficiency and effectiveness of the proposed algorithm for dual-armed cluster tools.
Publisher
TAYLOR & FRANCIS LTD
Issue Date
2015-10
Language
English
Article Type
Article
Citation

INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.53, no.19, pp.6007 - 6022

ISSN
0020-7543
DOI
10.1080/00207543.2015.1035813
URI
http://hdl.handle.net/10203/205301
Appears in Collection
IE-Journal Papers(저널논문)
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