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Showing results 1 to 4 of 4

1
Modeling and implementing a real-time scheduler for dual-armed cluster tools

Shin, YH; Lee, Tae-Eog; Kim, JH; Lee, HY, COMPUTERS IN INDUSTRY, v.45, no.1, pp.13 - 27, 2001-05

2
Scheduling a wet station for wafer cleaning with multiple job flows and multiple wafer-handling robots

Lee, Tae-Eog; Lee, HY; Lee, SJ, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.45, no.3, pp.487 - 507, 2007-02

3
Scheduling analysis of time-constrained dual-armed cluster tools

Kim, JH; Lee, Tae-Eog; Lee, HY; Park, DB, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.16, no.3, pp.521 - 534, 2003-08

4
Scheduling single-armed cluster tools with reentrant wafer flows

Lee, HY; Lee, Tae-Eog, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.19, no.2, pp.226 - 240, 2006-05

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