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Scheduling Wafer Lots on Diffusion Machines in a Semiconductor Wafer Fabrication Facility Kim, Yeong-Dae; Joo, BJ; Choi, SY, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.23, pp.246 - 254, 2010-05 |
반도체 공정에서 시간 제약 하에 병렬 설비를 갖는 연속 배치 공정의 스케줄링 연구 = Scheduling of consecutive batch process with parallel diffusion tools under time window constraints for semiconductor manufacturinglink 정찬휘; Jung, Chan-Hwi; et al, 한국과학기술원, 2014 |
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