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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

A flexure-guided scanner for an atomic force microscope: design and performance

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Lee, DY / Lee, MY / Park, JH / Gweon Dae Gabresearcher
Issue Date
2005-10-28
Language
ENG
Citation

Nanoengineering Symposium 2005, pp.360 - 365

URI
http://hdl.handle.net/10203/145917
Appears in Collection
ME-Conference Papers(학술회의논문)
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