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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

An investigation of silicon oxide thin film by atomic layer deposition

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Lee, JH / Han, CH / Kim, UJ / Park, Chong-Ookresearcher / Rha, SK / Lee, WJ
Issue Date
2004-04-13
Language
ENG
Citation

Amorphous and Nanocrystalline Silicon Science and Technology - 2004, v.808, pp.413 - 417

ISSN
0272-9172
URI
http://hdl.handle.net/10203/144071
Appears in Collection
MS-Conference Papers(학술회의논문)
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