진공용 공기베어링 배기시스템의 최적설계Optimal Design of an Exhaust System of a Vacuum-Compatible Air Bearing

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Publisher
한국정밀공학회
Issue Date
2006
Language
KOR
Citation

한국정밀공학회 2006년도 추계학술대회 , pp.139 - 140

URI
http://hdl.handle.net/10203/142138
Appears in Collection
ME-Conference Papers(학술회의논문)
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