진공용 공기베어링 배기시스템의 최적설계Optimal Design of an Exhaust System of a Vacuum-Compatible Air Bearing
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김경호 | - |
| dc.contributor.author | 박천홍 | - |
| dc.contributor.author | 이후상 | - |
| dc.contributor.author | 김승우 | - |
| dc.date.accessioned | 2013-03-17T09:45:04Z | - |
| dc.date.available | 2013-03-17T09:45:04Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2006 | - |
| dc.identifier.citation | 한국정밀공학회 2006년도 추계학술대회 , v., no., pp.139 - 140 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/142138 | - |
| dc.language | KOR | - |
| dc.publisher | 한국정밀공학회 | - |
| dc.title | 진공용 공기베어링 배기시스템의 최적설계 | - |
| dc.title.alternative | Optimal Design of an Exhaust System of a Vacuum-Compatible Air Bearing | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 139 | - |
| dc.citation.endingpage | 140 | - |
| dc.citation.publicationname | 한국정밀공학회 2006년도 추계학술대회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 김승우 | - |
| dc.contributor.nonIdAuthor | 김경호 | - |
| dc.contributor.nonIdAuthor | 박천홍 | - |
| dc.contributor.nonIdAuthor | 이후상 | - |
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