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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

Sloping profile and pattern transfer to silicon

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Jeon, J.-W. / Yoon, Jun-Boresearcher / Lim, Koeng Suresearcher
Issue Date
2006-06
Language
ENG
Citation

Pacific Conference of Transducers and Micro-Nano Technology 2006.

URI
http://hdl.handle.net/10203/141926
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EE-Conference Papers(학술회의논문)EE-Conference Papers(학술회의논문)
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