Sloping profile and pattern transfer to silicon
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Jeon, J.-W. | - |
| dc.contributor.author | Yoon, Jun-Bo | - |
| dc.contributor.author | Lim, Koeng Su | - |
| dc.date.accessioned | 2013-03-17T09:13:27Z | - |
| dc.date.available | 2013-03-17T09:13:27Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2006-06 | - |
| dc.identifier.citation | Pacific Conference of Transducers and Micro-Nano Technology 2006., v., no., pp. - | - |
| dc.identifier.uri | http://hdl.handle.net/10203/141926 | - |
| dc.language | ENG | - |
| dc.title | Sloping profile and pattern transfer to silicon | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | Pacific Conference of Transducers and Micro-Nano Technology 2006. | - |
| dc.identifier.conferencecountry | Singapore | - |
| dc.identifier.conferencecountry | Singapore | - |
| dc.contributor.localauthor | Yoon, Jun-Bo | - |
| dc.contributor.localauthor | Lim, Koeng Su | - |
| dc.contributor.nonIdAuthor | Jeon, J.-W. | - |
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