DSpace at KOASAS: New Plasma Source Development Using a Parallel Resonance Antenna for Dry Etching

DSpace at KOASAS

College of Natural Sciences(자연과학대학)Dept. of Physics(물리학과)PH-Conference Papers(학술회의논문)

New Plasma Source Development Using a Parallel Resonance Antenna for Dry Etching

Cited 0 time in webofscience

Cited 0 time in

Hit : 324
Download : 0

Export

Kwon, G.-C. / Kim, H.-S. / Kim, J.-S. / Choi, S.-H. / Jun, J.-H. / Lee, D.S. / Lee, Y.K. / Chang, Hong-Young researcher

Publisher: IEEE

Issue Date: 2003-06-02

Language: ENG

Citation: 2003 IEEE International Conference on Plasma Science, pp.403 -

ISSN: 0730-9244

URI: http://hdl.handle.net/10203/140878

Appears in Collection: PH-Conference Papers(학술회의논문)

Files in This Item: There are no files associated with this item.

Display Full Item Record

qr_code

트윗하기

KOASAS

Knowledge Service Development Team, KAIST 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea. T. 82-42-350-4493 Email. koasas@kaist.ac.kr
Copyright © 2016. Korea Advanced Institute of Science and Technology. All Rights Reserved.

KOASAS

KOASAS

Browse

New Plasma Source Development Using a Parallel Resonance Antenna for Dry Etching

KOASAS

Communities & Collections