Characterization of (Bi, Ce, La)4Ti3O12 thin film ofr FRAM capacitor prepared by combinatorial liquid source misted chemical deposition (LSMCD) process
- Issue Date
- 2004-01
- Language
- ENG
- Citation
2nd combinatorial & high throughput materials science in gordon conference, pp.25 - 30
- Appears in Collection
- CBE-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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