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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

ECRCVD에 의해 증착한 SiOF 저유전율 박막의 고유응력 발생원인

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최시경researcher / Kim, SP
Issue Date
1999
Language
KOR
Citation

추계 한국요업학회

URI
http://hdl.handle.net/10203/138302
Appears in Collection
MS-Conference Papers(학술회의논문)
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