The dependence of the preferred orientation and piezoelectric property of Pb(Zr0.52,Ti0.48)O3 (PZT) thin film on the deposition temperature

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Issue Date
2001-01-01
Language
ENG
Citation

10th International Meeting on Ferroelectrics (IMF-10), v.271, pp.27 - 32

ISSN
0015-0193
URI
http://hdl.handle.net/10203/138027
Appears in Collection
MS-Conference Papers(학술회의논문)
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