SEM and Auger Studies of a PLZT Thin-Film

Abstract

The microstructure and the composition profile of lead lanthanum zirconate titanate thin film fabricated using the sol-gel method were analyzed using the scanning electron microscope and scanning Auger microscope. The PLZT thin film consists of micron-scale spheroidal perovskite grains and nano-scale pyrochlore grains. The perovskite grain has a higher lead and lower oxygen and zirconium contents than the pyrochlore grain. The Auger spectra of the two phases were similar except for energy shift and extra fine structure of oxygen peaks. The Auger depth profile and SEM observation of the cross-sectional fracture surface showed higher perovskite content near the interface between PLZT and ITO films than the surface of the PLZT film.