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Buffered Oxide Etchant Post-Treatment of a Silicon Nanofilm for Low-Cost and Performance-Enhanced Chemical Sensors Gao, Min; Zhao, Zhi-Jun; Kim, Hyeonggyun; Jin, Mingliang; Li, Panpan; Kim, Taehwan; Kang, Kyungnam; et al, ACS APPLIED MATERIALS & INTERFACES, v.12, no.33, pp.37128 - 37136, 2020-08 |
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