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Development of Nanoimprinting and Maskless Lithography System and Process withImproved Patterning Quality for Advanced Packaging Lee, Wonsup; Lim, Hyungjun; Cho, Hyunmin; Kim, Geehong; Choi, Jinsu; Yoo, Hongki; Chang, WonSeok, The 20th International Symposium on Microelectronics and Packaging, ISMP 2022, The Korean Microelectronics and Packaging Society, 2022-11-10 |
Maskless lithography based on a digital micromirror device with improved patterning speed and quality Choi, Jinsu; Kim, Geehong; Lee, Wonsup; Cho, Hyunmin; Chang, Won Seok; Yoo, Hongki, SPIE Photonics West 2023, SPIE, 2023-01-31 |
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