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High Precision X-Y-Theta Micropositioning Stageusing Monolithic Flexure Pivoted Linkages Ryu, J.W.; Gweon, Dae-Gab, ASPE Annual Meeting, pp.626 - 630, 1996-11 |
Optimal design of a flexure hinge based XYθ wafer stage Ryu, J.W.; Gweon, Dae-Gab; Moon, K.S., PRECISION ENGINEERING, v.21, no.1, pp.18 - 28, 1997-07 |
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