Optimal design of a flexure hinge based XYθ wafer stage

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Optimal design of a XYθ micromotion stage is presented. The stage consists of a monolithic flexure hinge mechanism with three piezoelectric actuators. This paper describes the procedures of selecting parameters for the optimal design. In particular, it presents a mathematical formulation of the optimization problem. Based on the solution of the optimization problem, the final design of the stage is also presented. Experimental results indicate that the design procedure is effective, and the designed stage has the total range of 41.5 μm and 47.8 μm along the X- and Y-axes, respectively, and the maximum yaw motion range of 322.8 arcsec (1.565 mrad). © 1997 Elsevier Science Inc.
Publisher
Elsevier Inc.
Issue Date
1997-07
Language
English
Citation

PRECISION ENGINEERING, v.21, no.1, pp.18 - 28

ISSN
0141-6359
URI
http://hdl.handle.net/10203/68638
Appears in Collection
ME-Journal Papers(저널논문)
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