Showing results 1 to 4 of 4
A Flexure Hinge Mechanism for Atomic Force Microscopy Gweon, Dae-Gab; Moon, K.S.; Chung, H.W.; Shim, J.Y.; Ryu, J.W., Int. Conf. on Micromechatronics for Information and Precision Equipment, pp.286 - 290, 1997 |
Design and Characteristics of a 6-Axis UltraprecisionMicropositioning Stage Ryu, J.W.; Gweon, Dae-Gab, lnternational Precision Engineering Seminar, pp.412 - 416, 1997 |
High Precision X-Y-Theta Micropositioning Stageusing Monolithic Flexure Pivoted Linkages Ryu, J.W.; Gweon, Dae-Gab, ASPE Annual Meeting, pp.626 - 630, 1996-11 |
Optimal design of a flexure hinge based XYθ wafer stage Ryu, J.W.; Gweon, Dae-Gab; Moon, K.S., PRECISION ENGINEERING, v.21, no.1, pp.18 - 28, 1997-07 |
Discover